Title:
ELLIPSOMETER
Document Type and Number:
Japanese Patent JPH04294227
Kind Code:
A
Abstract:
PURPOSE:To obtain measuring values at a plurality of wavelengths in one measurement thereby to achieve quick measurement. CONSTITUTION:A parallel light from a multi color emitting light source 1 is, through a polarizer 2, a quarter wave plate 3, incident on the surface of a sample 4. The reflecting light is passed through a rotary analyzer 5 and directed onto a beam splitter 6 and then the divided light beams enter photodetecting parts 10. Each of photodetecting parts 10 can detect a beam of light of a specified wavelength. The angle PSI and the phase difference of the elliptically polarized light are operated by a CPU 12 from he photodetecting outputs. The index of refraction (n) and the film thickness (d) of a thin film for every wavelength are obtained from the operated angle PSI and phase difference .
Inventors:
YOSHIOKA YOSHIFUMI
Application Number:
JP5907591A
Publication Date:
October 19, 1992
Filing Date:
March 22, 1991
Export Citation:
Assignee:
SHIMADZU CORP
International Classes:
G01B11/06; G01J4/04; G01N21/21; (IPC1-7): G01B11/06; G01J4/04; G01N21/21
Attorney, Agent or Firm:
Yoshiaki Nishioka