Title:
エリプソメトリー装置
Document Type and Number:
Japanese Patent JP5648780
Kind Code:
B2
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Inventors:
福澤 健二
梶原 陽介
梶原 陽介
Application Number:
JP2009257187A
Publication Date:
January 07, 2015
Filing Date:
November 10, 2009
Export Citation:
Assignee:
国立大学法人名古屋大学
International Classes:
G01J4/04; G02B21/00
Attorney, Agent or Firm:
Hironori Onda
Makoto Onda
Makoto Onda