Title:
ELLIPTIC POLARIMETER, MEASURING DEVICE AND METHOD, AND LITHOGRAPHY DEVICE AND METHOD
Document Type and Number:
Japanese Patent JP2006030212
Kind Code:
A
Abstract:
To provide an elliptic polarimeter, a measuring device and a method, a lithography device and a method.
The elliptic polarimeter has an optical component and a detector. The optical component has two double-refractive parts which carry out optical communication via a boundary surface. The light incident on the boundary surface is divided into two reflecting components and two transmitted components. The detector is performed so as to measure the characteristics of at least three components in these four components. The polarizing state of the incident light can be determined, based on the measured characteristics.
Inventors:
Presura, Cristian N.
Application Number:
JP2005000235530
Publication Date:
February 02, 2006
Filing Date:
July 19, 2005
Export Citation:
Assignee:
ASML NETHERLANDS BV
International Classes:
G01J4/04; G03F7/20; H01L21/027; G01J4/00; G03F7/20; H01L21/02