To provide a method of preventing a plastic film from being hung down by weight in sealing a micro system using plastics.
This micro system 2 is integrated in a first cavity 3 formed by at least substrates 4, 6 and at least a part 8a of a first cover and bordering on an upper wall 7. The encapsuled part 1 has a second cavity 9 at least bordering on the whole of the upper wall of the first cavity 3 and a second cover 10 formed of a thin layer. The second cover 10 is covered with a film 11 made of plastic material, which is formed by casting. The manufacturing process of the encapsuled part 1 includes the steps of depositing layer of polymer material on the upper wall 7 of the first cavity 3, annealing the same to form a projecting sacrifical layer, depositing a thin film on the sacrifical layer, and removing the sacrifical layer to form a projecting second cover 10. A plastic film 11 is obtained by casting plastic material on the second cover 10.
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| US20040166606A1 | 2004-08-26 |
Hidetoshi Tachibana
Yasukazu Sato
Hiroshi Yoshimoto
Yasushi Kawasaki