Title:
エンコーダ装置、駆動装置、ステージ装置、及びロボット装置
Document Type and Number:
Japanese Patent JP7024207
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To provide an encoder device that stably operates.SOLUTION: An encoder device EC includes: a detector 1 for detecting information about the position on which a rotating body rotates; a magnet 21, which rotates relatively to the detector 1; and a signal generation unit 31 located in the direction perpendicular to the rotational axis AX of the rotating body for the magnet 21, the signal generation unit generating a detection signal by the large Barkhausen effect based on changes in the magnetic field formed by the magnet 21, the magnet being magnetized in the direction perpendicular to the rotational axis AX of the magnet 21.SELECTED DRAWING: Figure 1
Inventors:
Yuichi Mihashi
Katsura Abe
Katsura Abe
Application Number:
JP2017090058A
Publication Date:
February 24, 2022
Filing Date:
April 28, 2017
Export Citation:
Assignee:
NIKON CORPORATION
International Classes:
G01D5/245
Domestic Patent References:
| JP2009162730A | ||||
| JP6068592A | ||||
| JP2012026829A |
Foreign References:
| WO2016010141A1 | ||||
| US20100213927 | ||||
| WO2008047607A1 |
Attorney, Agent or Firm:
Kazuya Nishi
Takeshi Kawamura
Takeshi Kawamura