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Title:
END CAP OF HEAT TREATMENT FURNACE
Document Type and Number:
Japanese Patent JP2010203738
Kind Code:
A
Abstract:

To provide an end cap and a heat treatment furnace using the same capable of keeping a prescribed heat treatment atmosphere even if pressure in the heat treatment furnace is changed, and to provide the heat treatment furnace capable of performing heat treatment at a high temperature.

The end cap capable of tightly closed by a shutter member having a seal face 204, and attachable to an inlet 102 of a receiving section of the heat treatment furnace further includes a first insertion pipe 12 inserted to an inner peripheral face of the inlet 102, a groove 15 connected with the first insertion pipe around it, a first flange 20 capable of being kept into contact with the inlet 102 at a flange face 18, a second flange 24 having a flange face 25 kept into contact with the seal face 204 to be sealed, an exhaust pipe connected with a connecting section between the first flange and the second flange, and having an opening communicating with the inside of the furnace, and a seal gas introduction pipe opened into the groove and radially projecting from the connecting section.


Inventors:
OGATA KAZUO
Application Number:
JP2009052598A
Publication Date:
September 16, 2010
Filing Date:
March 05, 2009
Export Citation:
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Assignee:
SUMCO TECHXIV CORP
International Classes:
F27D7/06; F27B5/13; F27B5/16; F27D7/02; H01L21/22; F27B17/00
Attorney, Agent or Firm:
Toshihiko Aikawa