Title:
END EFFECTOR AND SUBSTRATE TRANSFER ROBOT HAVING IT
Document Type and Number:
Japanese Patent JP2009065165
Kind Code:
A
Abstract:
To provide a substrate transfer robot including an end effector.
An end effector comprises: a wrist plate; a first blade that is connected to the wrist plate so as to be movable in a vertical direction and configured to support a first substrate; and a second blade that is connected to the wrist plate so as to be adjacent to the first blade and configured to support a second substrate. An elevating unit moves the first blade upward to allow the first blade to support the first substrate, and moves the first blade downward to allow the second blade to support the second substrate.
Inventors:
HA CHONG-EUI
Application Number:
JP2008228621A
Publication Date:
March 26, 2009
Filing Date:
September 05, 2008
Export Citation:
Assignee:
SEMES CO LTD
International Classes:
H01L21/677; B25J9/06; B25J15/00; B65G49/07
Domestic Patent References:
| JPH09205127A | 1997-08-05 |
Attorney, Agent or Firm:
Atsushi Honda
Miho Ikegami
Miho Ikegami