Title:
END FACE REFLECTION TYPE SURFACE ACOUSTIC WAVE DEVICE
Document Type and Number:
Japanese Patent JP3969311
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To provide a surface acoustic wave device with an enhanced reflecting characteristic wherein an insulating film is formed to cover an electrode film and the electrode film is made of Al or an Al alloy.
SOLUTION: The end face reflection type surface acoustic wave device 1 includes: a piezoelectric substrate 2; the electrode film made of Al or an alloy principally containing Al on the piezoelectric substrate 2 and configuring at least one IDT3; and an insulating film 4 formed to cover the electrode film on the piezoelectric substrate 2 so that the average density of the insulation film 4 is equal to or less than 1.5 times the average density of the electrode film, and the upper face 4a of the insulating film 4 is made flat.
Inventors:
Takeshi Nakao
Kenji Nishiyama
Tetsuya Kimura
Michio Kadota
Kenji Nishiyama
Tetsuya Kimura
Michio Kadota
Application Number:
JP2003011370A
Publication Date:
September 05, 2007
Filing Date:
January 20, 2003
Export Citation:
Assignee:
MURATA MANUFACTURING CO.,LTD.
International Classes:
H03H9/145; H03H9/02; H03H9/25; H03H9/64; (IPC1-7): H03H9/145; H03H9/25; H03H9/64
Domestic Patent References:
| JP9294045A | ||||
| JP11186866A | ||||
| JP4239210A | ||||
| JP8265088A |
Attorney, Agent or Firm:
Miyazaki saki main tax