Title:
ENERGY AMOUNT CONTROLLER
Document Type and Number:
Japanese Patent JP3262138
Kind Code:
B2
Abstract:
PURPOSE: To irradiate a predetermined object with an energy beam via a high throughput without largely varying an attenuation factor of a pulse energy beam on the way of irradiating with the beam.
CONSTITUTION: Energy amount roughly regulating means 2 attenuates a pulse energy beam EB to maintain the number of pulses of minimum necessary number or more of the beam. Further, energy amount finely regulating means 3 continuously regulates an attenuation factor for the beam, and converts a value obtained by dividing a target energy totality by mean irradiating energy amount of the beam of an object 6 to be irradiated into integer.
Inventors:
Kazuaki Suzuki
Application Number:
JP17490292A
Publication Date:
March 04, 2002
Filing Date:
June 09, 1992
Export Citation:
Assignee:
NIKON CORPORATION
International Classes:
G03F7/20; H01L21/027; H01L21/30; (IPC1-7): H01L21/027; G03F7/20
Domestic Patent References:
| JP1257327A |
Attorney, Agent or Firm:
Satoshi Ohmori
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