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Title:
ENERGY CONVERSION ELEMENT AND ELECTROSTATIC DRIVING ELEMENT EQUIPPED WITH THE SAME, AND ELECTRONIC EQUIPMENT
Document Type and Number:
Japanese Patent JP2006328955
Kind Code:
A
Abstract:

To provide an energy conversion element capable of reducing drive voltage and drive current (power consumption), and an electrostatic driving element equipped with the same.

A conductive cantilever 13 (a first cantilever) is provided to a first substrate 11 side. When drive current I is supplied to the cantilever 13, a beam part 13A is horizontally extended by thermal expansion. After the direction of the beam part 13A is converted in a direction conversion part 14, a cantilever 25 (a second cantilever) on a second substrate 12 side is lifted. When the cantilever 25 comes close to a first electrode 22, a signal input part 25C is brought into contact with an input wiring 23 and an output wiring 24 by electrostatic force therebetween so as to make a signal circuit 'closed'. When a thermal driving power source is turned off, the 'closed' state of the signal circuit is maintained by the electrostatic force while the cantilever 13 is restored. When electrostatic driving power source is turned off, the signal circuit is 'opened' by separating the signal input part 25C from the input wiring 23 and output wiring 24 by restoring force of the cantilever 25 itself.


Inventors:
Tanaka, Naohiro
Application Number:
JP2005000149279
Publication Date:
December 07, 2006
Filing Date:
May 23, 2005
Export Citation:
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Assignee:
SONY CORP
International Classes:
F03G7/06; B81B3/00; H01H37/48; H01H59/00; H02N1/00