Title:
ENERGY DISPERSION TYPE X-RAY DETECTION DEVICE, SCANNING ELECTRON MICROSCOPE USING THE SAME AND ELECTRON BEAM MICRO ANALYZER
Document Type and Number:
Japanese Patent JP3890883
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To provide an energy dispersion type X-ray detection device having excellent vibration proofness and provided with a detecting part with a high low-noise decomposition function in a low cost.
SOLUTION: An electrode 2, to which a semiconductor X-ray detection element 1 and a high-voltage wire 8 are connected via a slit opening 10, is included in an insulator 3, which is stored in an element holder 4. A finger body 6 with high thermal conductivity coupled with a cold finger 7 contains a first stage FET 11, a gate electrode 13 connected to the gate and provided on the end face, and a substrate 5 provided with a heater resistance 12 mounted thereon and a FET wiring 9 for sending and receiving signals to and from outside. By fastening a female screw of the element holder 4 and a male screw 14 of the finger body to each other, the semiconductor X-ray detection element 1 is fixed with the electrode 2 and the gate electrode 13 sandwiching it.
Inventors:
Shinji Inoue
Kiyoshi Ogawa
Kiyoshi Ogawa
Application Number:
JP2000367871A
Publication Date:
March 07, 2007
Filing Date:
December 04, 2000
Export Citation:
Assignee:
SHIMADZU CORPORATION
International Classes:
G01N23/223; G01T7/00; G01N23/225; G01T1/24; G01T1/36; G21K7/00; H01L31/02; H01L31/09; (IPC1-7): G01T7/00; G01N23/223; G01N23/225; G01T1/24; G01T1/36; G21K7/00; H01L31/09; H01L31/02
Domestic Patent References:
| JP63193383U | ||||
| JP10505682A | ||||
| JP63195584A | ||||
| JP63120184U |
Attorney, Agent or Firm:
Toshifumi Kita
Hiroyuki Eguchi
Hiroyuki Eguchi