PURPOSE: To carry out the EDS analysis at a high accuracy by monitoring the electron beam energy of the sample radiating electron beams of an electron microscope and the like, and providing a function to use the resultant electron beam energy for the X-ray analysis processing.

CONSTITUTION: An energy dispersion type X-ray analysis device (shown as EDS hereinafter) is combined to a scanning type electron microscope (hereinafter referred to as SEM), and the electron beam 2 emitted from an electron gun 1 are focused slenderly by a focus lens 3 and an object lens 4 and radiated on a sample 5. The electron beams 2 are scanned on the sample 5 by using deflection coils 6 when the SEM image, the X-ray image, and the like are obtained. The X-rays generated from the sample 5 by radiating the electron beams 2 are detected by an EDS detector 7, delivered to an EDS analyzer 10, amplified and pulse-reformed, and spectrum-displayed on an EDS spectrum display 8. In the EDS analyzer 10, a storing device 11 to store the EDS spectrum and the like is incorporated.