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Title:
数個のチャンバを備えるコーティング装置用のエネルギーおよび媒体接続装置
Document Type and Number:
Japanese Patent JP4054014
Kind Code:
B2
Abstract:
The energy and media connection is in the form of a module and has as many connections for coolant lines and electrical lines as are required for the chamber with the most lines and the module can be transported from one chamber to another chamber. The module can be coupled to a rail system extending over the entire coating system.

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Inventors:
Gido Hattendorf
Gard Raedling
Gerhard List
Application Number:
JP2004327287A
Publication Date:
February 27, 2008
Filing Date:
November 11, 2004
Export Citation:
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Assignee:
APPLIED MATERIALS GMBH & CO. KG
International Classes:
C03C21/00; C23C14/34; C23C14/56; F04B27/02; F16K11/02; H01J37/32; H01J37/34; H01L51/40
Domestic Patent References:
JP6510565A
JP2000269149A
Foreign References:
WO2003040428A1
Attorney, Agent or Firm:
Hiroo Suzuki



 
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