Title:
ENVELOPE UNIT FOR LOCALLY VACUUM TREATING
Document Type and Number:
Japanese Patent JPS5988819
Kind Code:
A
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Inventors:
JIYON AARU RAMATSUTEINA
POORU FURANSHISU PETORITSUKU
POORU FURANSHISU PETORITSUKU
Application Number:
JP18324783A
Publication Date:
May 22, 1984
Filing Date:
October 03, 1983
Export Citation:
Assignee:
VARIAN ASSOCIATES
International Classes:
C23C14/56; F16J15/00; F16J15/16; H01J37/18; H01J37/301; H01L21/02; (IPC1-7): H01L21/02; H01L21/68
Attorney, Agent or Firm:
Sumio Takeuchi