Title:
環境形成装置
Document Type and Number:
Japanese Patent JP7312730
Kind Code:
B2
Abstract:
To develop an environment formation device in which an object can be put in a reduced-pressure environment and the variation in the temperature of the object can be reduced.SOLUTION: The environment formation device of the present invention includes: a reduced-pressure tank 10 in which the pressure of the inside is reduced; and a mounting board 40 set in the reduced-pressure tank 10, an object being mounted on the mounting board. A fluid introduction unit 41 is provided in the mounting board 40, a thermal medium is supplied to the fluid introduction unit 41, there are internal pipes 51 and 52 in the reduced-pressure tank 10, and a thermal medium is supplied to the fluid introduction unit 41 via the internal pipes 51 and 52.SELECTED DRAWING: Figure 4
More Like This:
Inventors:
川▲崎▼ 裕大
Daisuke Maki
Daisuke Maki
Application Number:
JP2020123190A
Publication Date:
July 21, 2023
Filing Date:
July 17, 2020
Export Citation:
Assignee:
Espec Co., Ltd.
International Classes:
G01N17/00
Domestic Patent References:
| JP2005524041A | ||||
| JP47038503B1 | ||||
| JP2011043275A | ||||
| JP2019203828A | ||||
| JP1151569A | ||||
| JP5558437A | ||||
| JP5336681A |
Foreign References:
| WO2016195111A1 |
Attorney, Agent or Firm:
Takashi Fujita