PURPOSE: To reduce the number of control valves by devising the constitution of a dilute gas producing means regarding improvement of an environment inspecting device and stably and highly accurately control a gas concn. covering a wide range of a gas dilution ratio.
CONSTITUTION: A moisture conditioned air generating means 11 producing the moisture conditioned air A2 of a specific flow rate by controlling and mixing an effluent amount of a dry air A0 and a moist air and a dilute gas producing means 12 generating the dilute dry air A02 of a specific flow rate by controlling the effluent specific amount of the dry air A0 or producing the primary corrosive dilute gas G1 of a flow rate by controlling and mixing the effluent amount of a corrosive gas G0 and the dry air A0 are provided. Moreover, a mixing means 13 mixing the moisture conditioned air A2 and the dilute dry air A02 and supplying a humidity environment air A to an inspecting vessel 14 or mixing the moisture conditioned air A2 and the primary corrosive dilute gas G1 and supplying a humidity gas environment air AG to the inspecting vessel 14 is provided.
| JP2018065073 | DILUTED HYDROGEN GAS GENERATION DEVICE |
| JP5227697 | Gas mixer |
| WO/2023/144029 | MIXING SYSTEM |
FUKUSHIMA SHIGERU
NAKAJIMA HIDEKAZU
YAMAZAKI SHIORI
ITABASHI MAYUMI
