Title:
環境に優しいII族およびIV族またはV族スピン-オン前駆材料
Document Type and Number:
Japanese Patent JP5128738
Kind Code:
B2
Inventors:
Thomas K. Dogerty
John Jay Drab
John Jay Drab
Application Number:
JP2001255878A
Publication Date:
January 23, 2013
Filing Date:
August 27, 2001
Export Citation:
Assignee:
RAYTHEON COMPANY
International Classes:
C07C59/125; C07F19/00; C07F3/00; C07F7/00; C07F7/28; C07F9/00
Domestic Patent References:
| JP8502946A | ||||
| JP1503151A | ||||
| JP2004048535A | ||||
| JP10512884A |
Foreign References:
| US5162378 | ||||
| US6054600 |
Attorney, Agent or Firm:
Kurata Masatoshi
Sadao Muramatsu
Ryo Hashimoto
Toshio Shirane
Sadao Muramatsu
Ryo Hashimoto
Toshio Shirane