Title:
エピタキシャルウェーハ製造方法
Document Type and Number:
Japanese Patent JP5515876
Kind Code:
B2
Inventors:
Kawashima Tadashi
Masahiro Yoshikawa
Masahiro Yoshikawa
Application Number:
JP2010050811A
Publication Date:
June 11, 2014
Filing Date:
March 08, 2010
Export Citation:
Assignee:
Sumco inc.
International Classes:
H01L21/205; C30B31/18; H01L21/20
Domestic Patent References:
| JP63258015A | ||||
| JP64076714A | ||||
| JP2007266125A | ||||
| JP2003209059A | ||||
| JP2008297164A |
Attorney, Agent or Firm:
Wilfort International Patent Office