Title:
等間隔パターン評価装置及び等間隔パターン評価方法
Document Type and Number:
Japanese Patent JP5878439
Kind Code:
B2
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Inventors:
Ippei Takahashi
Application Number:
JP2012180473A
Publication Date:
March 08, 2016
Filing Date:
August 16, 2012
Export Citation:
Assignee:
FUJIFILM Corporation
International Classes:
G01N21/88; G01M11/00
Domestic Patent References:
| JP2013015563A | ||||
| JP2013015564A | ||||
| JP2012122754A |
Attorney, Agent or Firm:
Kazunori Kobayashi