Title:
機器洗浄装置および方法
Document Type and Number:
Japanese Patent JP7076559
Kind Code:
B2
Abstract:
Embodiments described herein relate to a cleaning device and methods for cleaning an object. In one embodiment, the object is cleaned by moving a clean head along a surface of the object. Supercritical carbon dioxide fluid is delivered by supercritical carbon dioxide fluid vessel to the surface of the object. The supercritical carbon dioxide fluid and contamination material are removed from the object by a vacuum pump to a detector. One or more measurements of the contamination material are determined by the detector. Samples of the contamination material are collected by a collector. A contamination level of the surface of the object is determined by an analyzer.
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Inventors:
Mostovoi, Roman M.
Parique, Sketuarun
Egan, Todd
Parique, Sketuarun
Egan, Todd
Application Number:
JP2020540352A
Publication Date:
May 27, 2022
Filing Date:
November 07, 2018
Export Citation:
Assignee:
APPLIED MATERIALS,INCORPORATED
International Classes:
B08B3/08; H01L21/304; B08B7/00
Domestic Patent References:
| JP2009028634A | ||||
| JP2003117510A | ||||
| JP2003209088A | ||||
| JP2004512503A | ||||
| JP2007524228A |
Attorney, Agent or Firm:
Sonoda/Kobayashi Patent Business Corporation