Title:
低アウトガス性の光または電子ビーム硬化性ゴム状ポリマーを含む装置
Document Type and Number:
Japanese Patent JP2008522016
Kind Code:
A
Abstract:
Disclosed are photo or electron beam curable polymerizable compositions, and preparation thereof and devices containing such cured material. The composition contains completely or substantially completely hydrogenated hydrocarbon-based material completely free or substantially free of carbon-carbon double and triple bonds containing photo or electron beam curable terminal or pendant groups, low-outgassing photoinitiators, an optional viscosity adjustment component and an optional filler. The composition is visible light, UV or electron beam curable. It cures into a low-modulus, low outgassing polymer material. The composition can be used as an adhesive, sealant or lens potting material. It is ideal for use in lithographic tools and other optical devices involving deep or vacuum ultraviolet radiations, in particular, as lens potting materials for 248 nm, 193 nm and 157 nm lithographic tools, as well as other optical devices involving using high fluence irradiation.
Inventors:
Stuck, Paul Jay
Koi Kendall, Kelsey El
Dewa, Paul Gee
Savia, robert
Sauer, David Sea
Soni, Camel Kay
Koi Kendall, Kelsey El
Dewa, Paul Gee
Savia, robert
Sauer, David Sea
Soni, Camel Kay
Application Number:
JP2007544516A
Publication Date:
June 26, 2008
Filing Date:
November 29, 2005
Export Citation:
Assignee:
CORNING INCORPORATED
International Classes:
C09J4/00; C08F255/02; C08F279/02; C08K3/00; C08K5/00; C09J4/02; C09J121/00; C09J123/16; C09J123/26; C09K3/10
Domestic Patent References:
| JPH0733837A | 1995-02-03 | |||
| JP2004027141A | 2004-01-29 | |||
| JPH07138332A | 1995-05-30 | |||
| JP2003532753A | 2003-11-05 | |||
| JP2004176053A | 2004-06-24 |
Attorney, Agent or Firm:
Yanagita Seiji
Go Sakuma
Go Sakuma