高い処理量で板状ワークピースを露光する装置

Title:

高い処理量で板状ワークピースを露光する装置

Document Type and Number:

Japanese Patent JP7438219

Kind Code:

B2

Abstract:

A movable table system comprising two identical tables on a common rail arrangement having a linear rail region underneath a detection unit and a processing unit, and therefore the tables can be alternatingly moved in a straight line along the common rail arrangement, in the same table-movement direction, fully underneath the detection unit and processing unit, and can be independently controlled by a computer unit. The movable table system provides a new option for processing planar workpieces, in which a particularly high throughput rate and improved precision can be achieved using merely one processing unit.

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Inventors:

Lucker Stephen
Krovsky Uwe

Application Number:

JP2021533580A

Publication Date:

February 26, 2024

Filing Date:

December 11, 2019

Export Citation:

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Assignee:

Laser Imaging Systems GmbH

International Classes:

G03F7/20; B65G47/248

Domestic Patent References:

JP2008191303A
JP2011048239A
JP2005024957A
JP2004233608A
JP2007102116A
JP2009157249A
JP2012203265A
JP2016048273A

Foreign References:

WO2005015615A1

Attorney, Agent or Firm:

Patent Attorney Corporation YKI International Patent Office

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