Title:
基板を熱処理する装置
Document Type and Number:
Japanese Patent JP2013519863
Kind Code:
A
Abstract:
The invention relates to a heat treatment inner chamber (3) for thermally processing a substrate (20), having walls (10) which enclose an inner space (24) of the heat treatment inner chamber (3), having a mounting apparatus (8) for mounting the substrate (20) during the thermal processing and having an energy source (11) for introducing energy into the inner space (24) of the heat treatment inner chamber (3), at least one part of the inner sides of the walls (10) being formed in order to reflect power introduced by the energy source (11), wherein the at least one part of the inner sides of the walls (10) consists of a material which is highly reflective at least for infrared radiation. The invention furthermore relates to a heat treatment inner chamber (3) for thermally processing a substrate (20), having walls (10) which enclose an inner space (24) of the heat treatment inner chamber (3), having a mounting apparatus (8) for mounting the substrate (20) during the thermal processing and having an energy source (11) for introducing energy into the inner space (24) of the heat treatment inner chamber, wherein a cooling device (14) is provided for cooling the walls (10).
Inventors:
Andreas Caspari
Stephan Henkel
Utah Trove
Sven Stille
Martin Furfanger
Stephan Henkel
Utah Trove
Sven Stille
Martin Furfanger
Application Number:
JP2012553212A
Publication Date:
May 30, 2013
Filing Date:
February 14, 2011
Export Citation:
Assignee:
Leybold Optics GmbH
Saint-Gobain Glass France S.A.
Saint-Gobain Glass France S.A.
International Classes:
F27B5/10; B23K26/00; B23K26/12; C23C14/50; C23C14/58; F27B5/05
Domestic Patent References:
| JP2006071212A | 2006-03-16 | |||
| JP2002064215A | 2002-02-28 | |||
| JP2004327653A | 2004-11-18 | |||
| JP2001183070A | 2001-07-06 | |||
| JP2000055561A | 2000-02-25 | |||
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Foreign References:
| WO2004072323A2 | 2004-08-26 | |||
| WO2009153059A1 | 2009-12-23 | |||
| WO2006003798A1 | 2006-01-12 |
Attorney, Agent or Firm:
Einzel Felix-Reinhard
Takuya Kuno
Takuya Kuno