Title:
EQUIPMENT FOR MANAGEMENT OF INCOMINGS AND OUTGOINGS OF PHOTOMASK
Document Type and Number:
Japanese Patent JPS59181550
Kind Code:
A
Abstract:
PURPOSE:To manage the incomings and outgoings of photomasks quickly and accurately and suppress the generation of the dust as low as possible by providing a container shelf in which mask case containers are loaded, a transfer equipment and a computer. CONSTITUTION:When a type and a process of a product is specified by operating keys of an input part or an operation panel 33 of a photomask managing computer 50, the managing computor 50 retrieves the information stored in itself and finds out the location of a container 10 and a mask case 11 and gives instructions to a transfer control computer of a mating and anmating equipment 30. The transfer control computer drives and controls a transfer equipment 40 and the container 10 is inserted into the mating and anmating equipment 30 and the mask case 11 in which the indicated mask is contained is pushed up. Whenever a photomask is taken out and put in, the managing computer 50 renews the photomask information.
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Inventors:
KITAJIMA KOUJI
Application Number:
JP5553483A
Publication Date:
October 16, 1984
Filing Date:
March 31, 1983
Export Citation:
Assignee:
TOSHIBA KK
International Classes:
B65G1/04; B65G1/137; G03F7/20; H01L21/677; (IPC1-7): H01L21/68
Attorney, Agent or Firm:
Kiyoshi Inomata