PURPOSE: To make a very accurate plasma treatment available by partitioning an electric charge exchanging chamber for neutralizing ions and a treatment chamber with a perforated panel having a lot of microchannel holes, in an equipment which treats a body to be treated by casting hollow particle beam.
CONSTITUTION: This equipment is provided with a plasma chamber 20 having a plasma generating device, an electric charge exchanging chamber 22 which neutralizes positive ions generated in the plasma chamber 20 due to electric charge exchange and then generates neutral particles, and a treatment chamber 24 which etches a body to be treated S with the generated neutral particles. Between the two chambers 20 and 22, an ion extraction electrode 25 for extracting ions from the plasma chamber 20 into the electric charge exchanging chamber 22 and a mesh acceleration electrode 26 for accelerating the positive ions into the electric charge exchanging chamber 22 and an ion elimination electrode 30 are installed. In this case, the electric charge exchanging chamber 22 and the treatment chamber 24 are partitioned by a perforated panel 34 having fine linear microchannel holes for unifying the directions of the neutral particles and then for making a very accurate etching.
MURAKAWA EMI
KUBOTA NAOKI
