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Title:
気体種の圧力を監視する方法および監視のための装置
Document Type and Number:
Japanese Patent JP2008544229
Kind Code:
A
Abstract:
A method of monitoring pressure of a gas species up to at most a predetermined maximum pressure value is disclosed. The method includes exposing the gas species to transmission of laser light, periodically modulating the wavelength of the laser light over a wavelength band including at least one absorption line of the gas species, optoelectrically converting the transmitted laser light, thereby generating an electric output signal, performing at least one of first filtering the electric output signal with a filter characteristic having a lower cut-off frequency not lower than a transition frequency and of second filtering the electric output signal with a bandpass filter characteristic having an upper cut-off frequency not higher than the transition frequency and a lower cut-off frequency above the modulation frequency of the periodic wavelength modulation. The output of at least one of the filterings is evaluated as a pressure indicative signal.

Inventors:
MARTIN LEHMANN
Jean-Noel Fehr
Martin Lihiti
Urban schneer
Application Number:
JP2008516098A
Publication Date:
December 04, 2008
Filing Date:
May 31, 2006
Export Citation:
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Assignee:
MARTIN LEHMANN
International Classes:
G01L11/02; G01L7/10; G01N21/31; G01N21/39; G01N21/59
Domestic Patent References:
JPH10148613A1998-06-02
JPH041567A1992-01-07
Foreign References:
US20050022603A12005-02-03
Attorney, Agent or Firm:
Masatake Shiga
Takashi Watanabe
Yasuhiko Murayama
Shinya Mitsuhiro