Title:
被覆材料を蒸着する装置及び方法
Document Type and Number:
Japanese Patent JP4519653
Kind Code:
B2
Abstract:
Device for evaporating a high temperature superconductor (13) on a substrate in a vacuum comprises a refilling unit (5) for receiving a supply of high temperature superconductor material, an evaporation unit (1) for evaporating the high temperature superconductor material in an evaporating zone with a stream (2) of an energy transfer medium, and a conveying unit (3) for continuously conveying the superconductor material from the refilling unit to an evaporation zone so that the superconductor material is evaporated with leaving any residue. An Independent claim is also included for a process for evaporating a high temperature superconductor on a substrate in a vacuum.
Inventors:
Kinder, Helmut
Application Number:
JP2004548746A
Publication Date:
August 04, 2010
Filing Date:
October 15, 2003
Export Citation:
Assignee:
Teva Dunschicht Tehinik Gamebha
International Classes:
C23C14/24; C23C14/00; C23C14/08; C23C14/28; C23C14/30
Domestic Patent References:
| JP11086647A | ||||
| JP51014181A | ||||
| JP1108364A | ||||
| JP61003880A |
Foreign References:
| US4381894 |
Attorney, Agent or Firm:
Masumi Hosoda
So Ishii
Juno Aoki
So Ishii
Juno Aoki