Title:
複数の被処理物を熱処理する装置及び方法
Document Type and Number:
Japanese Patent JP4524438
Kind Code:
B2
Abstract:
An appliance for the simultaneous tempering and processing of a plurality of process items with the aid of electromagnetic radiation. The appliance is a stack oven, the process items and the energy sources being arranged on one another in such a way that a process item is present between two energy sources and an energy source is present between two process items. The appliance is particularly suitable for tempering the process items in the presence of a process gas. Using the appliance, a variable heating and cooling profile with variable process parameters is possible. In particular, reliable tempering of a process item in the form of a large-area multilayer body with layers of different physical properties is possible.
Inventors:
Volker Prost
Application Number:
JP2001531149A
Publication Date:
August 18, 2010
Filing Date:
October 20, 2000
Export Citation:
Assignee:
Saint-Gobain Glass France S.A.
International Classes:
F27B5/04; C21D9/00; F27B5/14; F27B5/16; H01L21/26; H01L21/324; H01L31/18; C21D1/34; C21D1/74
Domestic Patent References:
| JP10172435A | ||||
| JP552693U | ||||
| JP10281651A | ||||
| JP385633U | ||||
| JP6418729U | ||||
| JP778830A |
Attorney, Agent or Firm:
Toshio Yano
Toshiomi Yamazaki
Takuya Kuno
Hiroshi Sugimoto
Takahashi
Kimihiro Hoshi
Hiroyasu Ninomiya
Einzel Felix-Reinhard
Toshiomi Yamazaki
Takuya Kuno
Hiroshi Sugimoto
Takahashi
Kimihiro Hoshi
Hiroyasu Ninomiya
Einzel Felix-Reinhard