Title:
容器内の気体の圧力を測定する方法およびそれを実行するための装置
Document Type and Number:
Japanese Patent JP4332296
Kind Code:
B2
Abstract:
Two resistance elements (3, 6) are used for eliminating the influence of wall temperature on the gas pressure in a vessel, determined by a Pirani manometer. The first resistance element (3) is present in a first branch of a Wheatstone bridge (1), and the voltage is tapped by means of a voltage divider (7). The second resistance element (6) is present with a series resistance (5) in the second branch and is adjusted to a lower temperature. The changes in the voltages tapped at the branches are essentially identical for identical temperature changes at the resistance elements (3, 6), so that the Wheatstone bridge (1) remains balanced. The adjustment is improved by a constant current source (11). Another embodiment uses only one resistance element, whose temperature is reduced periodically during the balancing of the Wheatstone bridge and, after thermal equilibrium has been established, is determined by determining its resistance by means of a low constant current and is used for the computational compensation of the effect of the wall temperature. In a further embodiment, transient effects are produced by periodically switching a resistance back and forth and the frequencies are measured, from which the gas pressure is then determined.
Inventors:
Rolf, Norbert
Stocker, rudolf
Stocker, rudolf
Application Number:
JP2000513120A
Publication Date:
September 16, 2009
Filing Date:
September 01, 1998
Export Citation:
Assignee:
Inficon GmbH
International Classes:
G01L21/12
Domestic Patent References:
| JP3255926A | ||||
| JP8507863A |
Other References:
超小型フィラメント・ピラニ真空計の開発,真空 第37巻 第3号,日本,日本真空協会,1994年 3月20日,第37巻 第3号,p.278~281
Attorney, Agent or Firm:
Kuro Fukami
Toshio Morita
Yoshihei Nakamura
Yutaka Horii
Hisato Noda
Masayuki Sakai
Nobuo Arakawa
Toshio Morita
Yoshihei Nakamura
Yutaka Horii
Hisato Noda
Masayuki Sakai
Nobuo Arakawa