PURPOSE: To provide equipment for producing a silicon oxide coat capable of maintaining the deposit conditions of stable silicon oxide coat by omitting the changeover operation of filtration lines, by making continuous filtration while maintaining the constant filtration conditions and by decreasing the change in the flow conditions and composition of treating liquid in a treating tank.
CONSTITUTION: A treating tank 2 to store treating liquid consisting of silicon oxide oversaturated water solution of hydrosilicofluoric acid and to form a silicon oxide coat on a substrate 1 immersed in the treating liquid, a circulation line 3 to return the treating liquid taken off from the treating tank 2 to the treating tank 2 again, and a filter 4 to filtrate the treating liquid in the midway of the circulation line are provided. The filter 4 is equipped with an endless belt filter 5 and a driver 6 continuously and rotationally driving the filter, and at the same time, a filtration part 7 where the treating liquid is filtrated through the endless belt filter 5 continuously moving and a washing part 8 where the endless belt filter 5 leaving from the filtration part 7 is continuously washed are provided.
WATANABE YUKINORI
HAYASHI SHIGEO
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