Title:
複数のターボ分子ポンプを備えた装置およびポンプシステム
Document Type and Number:
Japanese Patent JP4674422
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To provide a device capable of reducing maximum power consumption at starting for a device equipped with turbo molecular pumps. SOLUTION: In this device equipped with a plurality of turbo molecular pumps TMP1 to TMP3, the turbo molecular pumps are started at times t11 , t21 and t31 respectively in order of the turbo molecular pumps TMP1, TMP2 and TMP3. The starting operation times of the turbo molecular pumps TMP1 to TMP3 are all equal, and thereby generation times of power consumption peaks P1, P2 and P3 just before transferring to a rated operation are deviated. Therefore, a peak value W3 of total power consumption can be reduced compared to a conventional one. As a result, a capacity of a power source on the device side can be reduced compared to the conventional one. Thus, the cost of the device can be reduced.
Inventors:
Hitoshi Yamaguchi
Application Number:
JP2001216289A
Publication Date:
April 20, 2011
Filing Date:
July 17, 2001
Export Citation:
Assignee:
SHIMADZU CORPORATION
International Classes:
F04B49/06; F04D19/04
Domestic Patent References:
| JP2001349295A | ||||
| JP8159083A | ||||
| JP56050788U | ||||
| JP51023809U | ||||
| JP50154901U | ||||
| JP29006938B1 |
Attorney, Agent or Firm:
Fuyuki Nagai