Title:
基板を格納するための基板容器及びウェハを搬送するための装置
Document Type and Number:
Japanese Patent JP5676516
Kind Code:
B2
Abstract:
A workpiece container stores at least one workpiece having a bottom surface and a peripheral edge. In one embodiment, a workpiece support structure is located within the container enclosure, which forms multiple vertically stacked storage shelves within the enclosure. Each storage shelf includes, in one embodiment, a first tine and a second tine for supporting the workpiece in a substantially horizontal orientation. The bottom surface and peripheral edge of a workpiece seated on a storage shelf extends beyond the outer edge of both the first tine and the second tine. An end effector may engage these extended portions or “grip zones” of the workpiece.
Inventors:
ボノラ アンソニー シー
Application Number:
JP2012090294A
Publication Date:
February 25, 2015
Filing Date:
April 11, 2012
Export Citation:
Assignee:
ブルックス オートメーション インコーポレイテッド
International Classes:
H01L21/673; B65D85/86; B65G49/07; H01L21/677
Attorney, Agent or Firm:
Sadao Kumakura
Pupil circle 健
Sari Ino
Matsushita 満
Ichiro Kurasawa
Pupil circle 健
Sari Ino
Matsushita 満
Ichiro Kurasawa