Title:
マイクロバルブ及びその製造方法、並びにこれを用いたマイクロポンプ及びその製造方法、このマイクロポンプを用いた装置
Document Type and Number:
Japanese Patent JP3726285
Kind Code:
B2
Abstract:
A microvalve is equipped with an elastic diaphragm that moves vertically by change in pressure, a support substrate that supports said elastic diaphragm, a holding substrate that holds said support substrate, and a valve protrusion provided on said elastic diaphragm or holding substrate, is equipped with a valve seal part that performs control of fluid, being equipped with, when in a stationary state, a structure that is provided with a gap between said valve seal part and elastic diaphragm, or, a structure in which the width of the contact part between said valve seal part, and the holding substrate or the elastic diaphragm, is equal to or less than 50 mu m, and the microvalve fabrication method, and a micropump that uses the microvalve and its fabrication method, and a device that uses the micropump, are presented.
Inventors:
Hiroshi Funasaka
Takamori Fujimori
Hajime Miyazaki
Takamori Fujimori
Hajime Miyazaki
Application Number:
JP50432097A
Publication Date:
December 14, 2005
Filing Date:
July 29, 1996
Export Citation:
Assignee:
Seiko Epson Corporation
International Classes:
F04B43/02; F04B43/04; F04B53/10; F15C5/00; F16K99/00; (IPC1-7): F04B43/02
Domestic Patent References:
| JP3505771A | ||||
| JP5502079A | ||||
| JP466784A |
Foreign References:
| WO1993020351A1 |
Attorney, Agent or Firm:
Masahiko Ueyanagi
Osamu Suzawa
Osamu Suzawa