Title:
粒子線を静電的に偏向させる装置
Document Type and Number:
Japanese Patent JP4538126
Kind Code:
B2
Abstract:
The deflection device has a number of electrodes provided by deflection wires (2) coupled to a control circuit (5), providing variable deflection voltages for deflection of the particle beam in a given coordinate direction (X,Y). A number of deflection wires (2.11,2.12,2.21,2.22,2.31,2.32) are combined to provide a deflection grid, with all the wires in the deflection grid supplied with equal deflection voltages by the control circuit.
Inventors:
Hans Joachim Derink
Thomas Elster
Thomas Elster
Application Number:
JP2000046207A
Publication Date:
September 08, 2010
Filing Date:
February 23, 2000
Export Citation:
Assignee:
Vistec Electron Beam Game Beamer
International Classes:
H01J37/147; G03F7/20; H01J3/30; H01L21/027
Domestic Patent References:
| JP62059953U |
Attorney, Agent or Firm:
Fujita Akira