Title:
光学式距離測定装置及び支持部材上の部品の位置を決定する装置
Document Type and Number:
Japanese Patent JP2529691
Kind Code:
B2
Abstract:
Arrangement for optically measuring a distance between a surface and a reference plane. An optical distance or profile meter in which radiation reflected from a surface (630) is projected onto a radiation-sensitive detection system via an optical system (641, 642) comprises a radiation-blocking plate (650) formed with radiation windows (651). The radiation-blocking plate only transmits radiation which is reflected from the surface at an angle relative to the optical axis of the optical system. The extent of the pattern of radiation spots thus formed on the detection system is a measure of the distance ( DELTA h) from the surface. The detection system may comprise a semi-transparent filter (660) whose transmission coefficient exhibits a position-dependent variation. This enables the radiation-sensitive element to be constructed as a single element (661) and the effects of speckle noise to be reduced substantially.
Inventors:
アリー・ジェフレイ・デン・ブッフ
Application Number:
JP13905487A
Publication Date:
August 28, 1996
Filing Date:
June 04, 1987
Export Citation:
Assignee:
フィリップス エレクトロニクス ネムローゼ フェンノートシャップ
International Classes:
G01B11/02; G01B11/06; G01B11/00; G01C3/00; G01C3/06; G02B7/34; (IPC1-7): G01C3/06; G01B11/00
Domestic Patent References:
| JPS62197711A |
Attorney, Agent or Firm:
杉村 暁秀 （外１名）