Title:
加工物を処理する装置
Document Type and Number:
Japanese Patent JP4485868
Kind Code:
B2
Abstract:
The arrangement has at least one treatment device for accommodating at least one workpiece, a rotor on which the treatment device is arranged, a rotary fluid lead through (182) for feeding at least one fluid to the rotor and/or carrying at least one fluid away from it with a journal (102) and a sleeve (104) that are at least partly sealed relative to each other with the journal rotatably arranged in the sleeve. An independent claim is also included for a rotary fluid leadthrough device for an inventive arrangement.
Inventors:
Gregor Arnold
Andreas Rutling House-Henkel
Jürgen Klein
Stefan Bere
Andreas Rutling House-Henkel
Jürgen Klein
Stefan Bere
Application Number:
JP2004208679A
Publication Date:
June 23, 2010
Filing Date:
July 15, 2004
Export Citation:
Assignee:
Schott AG
International Classes:
C23C16/44; C23C16/50; F16L39/04
Domestic Patent References:
| JP11336971A | ||||
| JP2002540364A | ||||
| JP1103625U |
Foreign References:
| US3999766 |
Attorney, Agent or Firm:
Okabe
Masao Okabe
Nobuaki Kato
Kazuo
Shinichi Usui
Takao Ochi
Teruhisa Motomiya
Seiichiro Takahashi
Koji Yoshizawa
Takao Matsui
Masao Okabe
Nobuaki Kato
Kazuo
Shinichi Usui
Takao Ochi
Teruhisa Motomiya
Seiichiro Takahashi
Koji Yoshizawa
Takao Matsui