Title:
等価容量型アクチュエータの駆動装置及び駆動方法
Document Type and Number:
Japanese Patent JP5393332
Kind Code:
B2
Inventors:
Tsuyoshi Mizuno
Takaaki Kato
Takaaki Kato
Application Number:
JP2009183415A
Publication Date:
January 22, 2014
Filing Date:
August 06, 2009
Export Citation:
Assignee:
Saitama University
International Classes:
H02N1/00; B25J15/06; H01L21/677
Domestic Patent References:
| JP9322564A | ||||
| JP200034018A | ||||
| JP20019766A | ||||
| JP2004335811A |
Foreign References:
| WO2006082807A1 |
Attorney, Agent or Firm:
Ohashi
Hayashi Hiroki
Hayashi Hiroki