To prevent cracking of a glass substrate in a liquid by perpendicularly nipping both smooth surfaces of the glass substrate by a plurality of upright rollers, respectively, and carrying the glass substrate upright by the rotation of the upright rollers.
A glass substrate 5 in a solution, such as cleaning solution, is nipped by symmetrically mounted upright rollers groups 6, 7 and is carried upright by the rotation of the upright roller groups 6, 7. The upright roller groups have elastic members 8, 9, 10, 11 while nipping and guiding the glass substrate 5 in contact with both smooth surfaces. The upper and lower ends of the glass substrate 5 are supported by an upper roller group 12 and a lower roller group 13, respectively. Since the upper end of the glass substrate 5 makes contact with a cushion member 15 provided on the groove part 14 of the upper roller group 12 and the lower end of the glass substrate 5 engages with a cushion member 17 provided on the groove part 16 of the lower roller group 13, both the upper and lower ends of the glass substrate 5 are guided without shaking.
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