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Title:
ERECT CARRYING METHOD OF GLASS SUBSTRATE AND CARRYING DEVICE THEREOF
Document Type and Number:
Japanese Patent JP2000233830
Kind Code:
A
Abstract:

To prevent cracking of a glass substrate in a liquid by perpendicularly nipping both smooth surfaces of the glass substrate by a plurality of upright rollers, respectively, and carrying the glass substrate upright by the rotation of the upright rollers.

A glass substrate 5 in a solution, such as cleaning solution, is nipped by symmetrically mounted upright rollers groups 6, 7 and is carried upright by the rotation of the upright roller groups 6, 7. The upright roller groups have elastic members 8, 9, 10, 11 while nipping and guiding the glass substrate 5 in contact with both smooth surfaces. The upper and lower ends of the glass substrate 5 are supported by an upper roller group 12 and a lower roller group 13, respectively. Since the upper end of the glass substrate 5 makes contact with a cushion member 15 provided on the groove part 14 of the upper roller group 12 and the lower end of the glass substrate 5 engages with a cushion member 17 provided on the groove part 16 of the lower roller group 13, both the upper and lower ends of the glass substrate 5 are guided without shaking.


Inventors:
MIZUNO HIROSHI
Application Number:
JP8024299A
Publication Date:
August 29, 2000
Filing Date:
February 16, 1999
Export Citation:
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Assignee:
SAMUKON KK
International Classes:
H01L21/677; B65G13/00; B65G49/02; B65G49/06; (IPC1-7): B65G49/06; B65G13/00; B65G49/02; H01L21/68