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Title:
ETCHANT FOR SILICON NITRIDE
Document Type and Number:
Japanese Patent JP2012033561
Kind Code:
A
Abstract:

To provide an etchant by which etching of silicon nitride is highly selectively performed without generating deposits after etching, in a step of removing silicon nitride from an electronic substrate having both a silicon dioxide layer and a silicon nitride layer.

The etchant for silicon nitride is used which contains, as essential components, a quaternary alkyl ammonium salt having a specific chemical structural formula, a basic compound, and an inorganic acid and/or an organic acid.


Inventors:
YOSHIDA YUTAKA
SHOJI YUKICHI
Application Number:
JP2010169584A
Publication Date:
February 16, 2012
Filing Date:
July 28, 2010
Export Citation:
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Assignee:
SANYO CHEMICAL IND LTD
International Classes:
H01L21/306; C09K13/00; C09K13/06; H01L21/308



 
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