Title:
光電池を作製する方法におけるエッチング組成物およびその使用
Document Type and Number:
Japanese Patent JP2013535108
Kind Code:
A
Abstract:
This invention provides a method of making a photovoltaic cell. The method uses an etching composition comprising one or more onium salts selected from the group consisting of iodonium salts and sulfonium and an organic medium to etch the anti-reflection coating. Also provided is a photovoltaic cell made by this method.
Inventors:
Angel Earl Cartagena
Feng Gao
Haishin Yang
Chang Lei
Feng Gao
Haishin Yang
Chang Lei
Application Number:
JP2013515464A
Publication Date:
September 09, 2013
Filing Date:
June 15, 2011
Export Citation:
Assignee:
E.I.DU PONT DE NEMOURS AND COMPANY
International Classes:
H01L21/308; C09K13/00; C09K13/04; C09K13/12; H01L31/04
Attorney, Agent or Firm:
Patent Business Corporation Tani/Abe Patent Office