Title:
ETCHING APPARATUS
Document Type and Number:
Japanese Patent JPS51114341
Kind Code:
A
Inventors:
IMAI MINORU
NASU SHIGENORI
OOTSU MAMORU
NASU SHIGENORI
OOTSU MAMORU
Application Number:
JP3911075A
Publication Date:
October 08, 1976
Filing Date:
April 02, 1975
Export Citation:
Assignee:
HITACHI LTD
International Classes:
C25F7/00; H01L21/02; H01L21/3063; (IPC1-7): C25F7/00; H01L21/02
Domestic Patent References:
| JPS4940532A |