Title:
【発明の名称】エッチング制御装置
Document Type and Number:
Japanese Patent JP2916093
Kind Code:
B2
Inventors:
AKASEGAWA KATSUO
Application Number:
JP4854695A
Publication Date:
July 05, 1999
Filing Date:
March 08, 1995
Export Citation:
Assignee:
NIPPON AKUA KK
International Classes:
G01N27/26; C23F1/08; G05D21/00; H05K3/06; (IPC1-7): C23F1/08; H05K3/06
Domestic Patent References:
| JP4122090A | ||||
| JP5299809A | ||||
| JP5466097U |
Attorney, Agent or Firm:
Hisao Komori