エッチングガス - Central Glass Co., Ltd.

Title:

エッチングガス

Document Type and Number:

Japanese Patent JP3611722

Kind Code:

B2

Inventors:

Isamu Mouri
Hidetoshi Nanai
Mitsuya Ohashi

Application Number:

JP20670398A

Publication Date:

January 19, 2005

Filing Date:

July 22, 1998

Export Citation:

Assignee:

Central Glass Co., Ltd.

International Classes:

C09K13/00; C09K13/08; H01L21/302; H01L21/3065; (IPC1-7): C09K13/08; C09K13/00; H01L21/3065

Domestic Patent References:

JP2000038673A

Attorney, Agent or Firm:

Yoshiyuki Nishi

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