Title:
エッチング液組成物およびエッチング方法
Document Type and Number:
Japanese Patent JP5885993
Kind Code:
B2
Inventors:
Takao Yamaguchi
Norio Ishikawa
Norio Ishikawa
Application Number:
JP2011228237A
Publication Date:
March 16, 2016
Filing Date:
October 17, 2011
Export Citation:
Assignee:
Kanto Chemical Co., Ltd.
International Classes:
H01L21/308; C09K13/04; C23F1/18; H01L21/306; H01L21/3205; H01L21/3213; H01L21/768; H01L23/532
Domestic Patent References:
| JP2009235438A | ||||
| JP11256368A | ||||
| JP2009231427A | ||||
| JP2006524750A | ||||
| JP10083762A | ||||
| JP2008207235A |
Attorney, Agent or Firm:
Kiyoji Kuzuwa
Ayako Matsuura
Ayako Matsuura