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Patent Searching and Data


Title:
ETCHING METHOD AND DEVICE
Document Type and Number:
Japanese Patent JPS55104482
Kind Code:
A
Inventors:
TOOMAN ESU RAATOSU
Application Number:
JP744680A
Publication Date:
August 09, 1980
Filing Date:
January 26, 1980
Export Citation:
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International Classes:
C23F4/00; G01N21/27; H01J37/32; (IPC1-7): C23F1/00; C23F1/08



 
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