無機表面用エッチングペースト - Merck Patent Gesellschaft mit beschraenkter Haftung

Title:

無機表面用エッチングペースト

Document Type and Number:

Japanese Patent JP5734259

Kind Code:

B2

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Inventors:

Klein, Silke
Haider, Lilia
Zielinski, Claudia
Cubel Beck, Armin
Stockum, Werner

Application Number:

JP2012243337A

Publication Date:

June 17, 2015

Filing Date:

November 05, 2012

Export Citation:

Assignee:

Merck Patent Gesellschaft mit beschraenkter Haftung

International Classes:

C03C15/00; C09K13/08; H01L21/308

Domestic Patent References:

Foreign References:

WO2000064828A1

Attorney, Agent or Firm:

Akio Miyazaki
Masaaki Ogata

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