Title:
導電性高分子用エッチング液および導電性高分子をパターニングする方法
Document Type and Number:
Japanese Patent JP5020591
Kind Code:
B2
Inventors:
Takashi Ihara
Takahiro Fujimoto
Takahiro Fujimoto
Application Number:
JP2006268737A
Publication Date:
September 05, 2012
Filing Date:
September 29, 2006
Export Citation:
Assignee:
Tsurumi Soda Co., Ltd.
Toagosei Co., Ltd.
Toagosei Co., Ltd.
International Classes:
C09K13/04; H01G9/028; H01L21/308
Domestic Patent References:
| JP2006224517A | ||||
| JP2004303940A | ||||
| JP4250642A | ||||
| JP6021157A | ||||
| JP5335718A | ||||
| JP3132011A |
Foreign References:
| WO1997018944A1 | ||||
| WO2005122286A1 |
Attorney, Agent or Firm:
Yasuhiro Noguchi
Akiko Deep Sea
Akiko Deep Sea