Title:
Etching solution constituent
Document Type and Number:
Japanese Patent JP6174935
Kind Code:
B2
Inventors:
Uchino Yuki
Naoki Kamibayashi
Naoki Kamibayashi
Application Number:
JP2013162027A
Publication Date:
August 02, 2017
Filing Date:
August 05, 2013
Export Citation:
Assignee:
Sanwa Yuka Kogyo Co., Ltd.
International Classes:
C09K13/06
Domestic Patent References:
| JP5112885A | ||||
| JP2010265524A |
Foreign References:
| WO2012064001A1 |
Attorney, Agent or Firm:
Michio Nakajima
Masahiro Nakashima
Masahiro Nakashima
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