Title:
エッチング液及びエッチング方法
Document Type and Number:
Japanese Patent JP5514005
Kind Code:
B2
Inventors:
Nakata Takuto
Yoshikiyo Nakagawa
Yoshikiyo Nakagawa
Application Number:
JP2010137117A
Publication Date:
June 04, 2014
Filing Date:
June 16, 2010
Export Citation:
Assignee:
Asahi Kasei E-materials Co., Ltd.
International Classes:
C09K13/06
Domestic Patent References:
| JP4055543B2 | ||||
| JP2008046513A | ||||
| JP2007035232A |
Foreign References:
| WO2009093700A1 |
Attorney, Agent or Firm:
Hiroyoshi Aoki
Amada Masayuki
Amada Masayuki