Title:
EVACUATION APPARATUS
Document Type and Number:
Japanese Patent JP2016153620
Kind Code:
A
Abstract:
PROBLEM TO BE SOLVED: To provide an evacuation apparatus having a configuration of serially connecting in multistage a vacuum pump and a high vacuum pump that compress and exhaust gas by rotation of rotors, and capable of suppressing loudness of noise.SOLUTION: An evacuation apparatus comprises: an exhaust valve coupled to an exhaust port of a chamber; a first vacuum pump connected to the exhaust valve and evacuating the inside of the chamber with compression and exhaust caused by rotation of a rotor; a second vacuum pump serially connected to the first vacuum pump in multistage and evacuating the inside of the chamber; and a control device controlling open and close operation of the exhaust valve and turning on and off of an electric power source of the first vacuum pump. The control device turns on the electric power source of the first vacuum pump from a state in which the exhaust valve is closed and the first vacuum pump and the second vacuum pump are activated, then after a fixed stop time elapses, opens the exhaust valve, and further after a fixed decompression time elapses, turns on the electric power source of the first vacuum pump.SELECTED DRAWING: Figure 1
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Inventors:
NAKAYAMA TANEYOSHI
Application Number:
JP2015031887A
Publication Date:
August 25, 2016
Filing Date:
February 20, 2015
Export Citation:
Assignee:
SHIMADZU CORP
International Classes:
F04C23/00; B01J3/02; F04B37/16; F04C25/02; F04C28/06; F04C29/06; H01L21/3065
Attorney, Agent or Firm:
Hidekazu Miyoshi
Masakazu Ito
Masakazu Ito